SENTRY 1000 MANUAL
Manual Exhaust Controller Prevent contamination at the source with the SENTRY 1000 Manual Exhaust Controller. This unique air-flow management system isolates and stabilizes house exhaust at the point of use, improving safety as well as increasing yield. The simple, straightforward design, gravity-calibrated with a single moving part, responds immediately and reliably to fluctuations in house exhaust. For applications requiring a single set point, the SENTRY 1000 Manual provides exhaust regulation with manual set point control, minimizing cost.
Features
- Simplicity
- Compatibility with all track tools
- Point-of-use air-flow regulation with millisecond response time
- Stable exhaust environment
Benefits
- Reliable, fail-safe operation
- Flexibility
- Stable exhaust for: Improved coating uniformity
- Reduced defect density
- Enhanced DUV sensitivity
- Better CD control
- Less contamination
- Improved repeatability
- Reduced splashback
- Smaller edge exclusion
- Outgassing isolation
- Energy savings
Primary Applications
- Coat
- Develop
- Hot Plate
- APCVD
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