PRECISION AIR FLOW CONTROLS
Brooks Air Flow Control products provide precision exhaust control between a process tool and house exhaust. Such precision control is necessary in almost all applications to prevent fluctuations from affecting the process tool's Flow and Pressure requirements. Brooks Air Flow Control products are ideal for many applications where precision is necessary in processes like Wafer Coat and Develop, Atmospheric Diffusion Furnaces, Automated Wet Stations, Rapid Thermal Processing and APCVD.   
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