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Equipment Front-End Module (EFEM) for Handling 200mm to 300mm Semiconductor Wafers
The FabExpress™ (FX) atmospheric system is a bridge system designed to simultaneously handle 200mm and 300mm wafers. It is optimized with the Brooks Reliance™ robotics automation component set (robot and aligner) and the Brooks family of Load Port Modules qualified by 300mm fabs. Although targeted for the metrology market segment, the FX's ease of configurability and wide selection of off-the-shelf options has enabled OEMs to successfully transition the Brooks EFEM into other market applications. The FabExpress interface to the OEM's process side is made easy and the clean architecture allows for ease of serviceability, maintenance, and low cost of ownership. It is truly a fab ready product designed to satisfy the many different fab requirements helping the OEMs transition the final equipment into production.
Whether it is an edge grip or vacuum handling solution you are looking for, the FabExpress can accommodate your needs. The FX is built and designed to be compliant with all the prevailing industry standards (SEMI and safety).
The FabExpress is available in three different footprints accommodating up to four load port module ports.
The models are as follows:
| FX 2000 |
EFEM with 2 BOLTS load port module ports, trackless robotics solution
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| FX 3000 |
EFEM with 3 BOLTS load port module ports, robotics with and without track solutions available |
| FX 4000 |
EFEM with 4 BOLTS load port module ports, robotics with and without track solutions available | |