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RELIANCE ATR™


 

The Reliance ATR™ robot provides the lowest cost of ownership and highest productivity for semiconductor material handling applications.

The Reliance ATR™ is a high performance robot utilizing a compact, direct drive assembly and detached DSP based control electrionics.  Patented Time Optimal Trajectory™ and Time Optimal Path™ move planning provides up to 20% increase in speed over traditional "S" curve algorithms.  Superior robot controls combined with continuous rotation capability enable the highest possible operating speeds.  The Off-Center Pick feature enables access to multiple orthogonally placed cassettes, FOUPs, and process modules without a traverser mechanism.

Designed to Brooks Automation's high standards for 12.8 million MCBF, the Reliance ATR™ is ideal for production equipment requiring the lowest possible vibration and particle contamination, and the highest possible throughput and reliability.

A control display module, macro programming capability, and multiple diagnostic functions simplify setup, integration, and improves serviceability.


FeaturesBenefits
Three available arm lengths4th generation of direct drive brushless servomotors
Three available Z strokesState of the Art motion control
Two individually controlled pneumatic lines available at wristDesigned-in Reliability without Preventative Maintenance schedule
Z brake standardHigh Throughput
Substrate presence sensing standard on end effectorMinimal Footprint with Optimal Serviceability
Reflective or Throughbeam wafer edge sensing optionalOff Center Pick/Place allowing single or dual FOUP access without a Traverser
Backside or edge contact end effectors available as optionsWafer Position Determination and Fault Detection

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