RELIANCE ATR™
 The Reliance ATR™ robot provides the lowest cost of ownership and highest productivity for semiconductor material handling applications.
The Reliance ATR™ is a high performance robot utilizing a compact, direct drive assembly and detached DSP based control electrionics. Patented Time Optimal Trajectory™ and Time Optimal Path™ move planning provides up to 20% increase in speed over traditional "S" curve algorithms. Superior robot controls combined with continuous rotation capability enable the highest possible operating speeds. The Off-Center Pick feature enables access to multiple orthogonally placed cassettes, FOUPs, and process modules without a traverser mechanism. Designed to Brooks Automation's high standards for 12.8 million MCBF, the Reliance ATR™ is ideal for production equipment requiring the lowest possible vibration and particle contamination, and the highest possible throughput and reliability. A control display module, macro programming capability, and multiple diagnostic functions simplify setup, integration, and improves serviceability.
| Features | Benefits | | Three available arm lengths | 4th generation of direct drive brushless servomotors | | Three available Z strokes | State of the Art motion control | | Two individually controlled pneumatic lines available at wrist | Designed-in Reliability without Preventative Maintenance schedule | | Z brake standard | High Throughput | | Substrate presence sensing standard on end effector | Minimal Footprint with Optimal Serviceability | | Reflective or Throughbeam wafer edge sensing optional | Off Center Pick/Place allowing single or dual FOUP access without a Traverser | | Backside or edge contact end effectors available as options | Wafer Position Determination and Fault Detection |
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