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  • 05/17/13 - Brooks Automation Announces Selection by Tohoku Medical Mega Bank, Sendai, Japan for Multiple Automa...
  • 05/09/13 - Brooks Automation Reports Fiscal Second Quarter Ended March 31, 2013 Results
  • 05/01/13 - Brooks Automation to Present at the B. Riley & Co. 14th Annual Investor Conference
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  • 04/04/13 - Brooks Automation Announces Fiscal 2013 Second Quarter Earnings Release Date and Conference Call
  • 01/31/13 - Brooks Automation Reports Fiscal First Quarter Ended December 31, 2012 Results and Timetable for Chi...
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  • 01/10/13 - Brooks Automation Announces Fiscal 2013 First Quarter Earnings Release Date and Conference Call
  • 01/03/13 - Brooks Automation to Present at the Needham Growth Conference
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Brooks Life Science Systems™  |  CTI-Cryogenics®  |  Granville-Phillips®  |  MagnaTran®  |  Polycold® Systems  |  BioStore™

 

  • Products
    • Semiconductor Automation
      Featured Product
      Spartan 300 Sorter 4 I/O
      Spartan™ 300mm
      4 I/O Sorter
       
        • Factory Automation Solutions
          • Spartan Sorters
            Spartan 300mm Sorter 4 I/O

            Spartan Sorters

            This unified wafer management system uses the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.
          • DARTS FOUP Buffer
            DARTS FOUP Buffer

            DARTS FOUP Buffer

            Represents a new generation of flexible, near-tool buffering devices. Utilizes the space under the ceiling and can be mounted in a cleanroom aisle or on top of a process tool.
          • Load Ports
            • Certon™ 450 Load Port
              Certon 450mm Load Port

              Certon™ 450 Load Port

              The Certon™ 450mm Load Port is compliant to 450mm FOUP, FOSB, and MAC (Multi Application Carrier) standards.
            • Vision™ 300 Load Port
              Vision Loadport with FOUP

              Vision 300 Load Port

              The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. Unlike LPMs that require substantial lead time for set-up and integration, the Vision load port module is designed for maximum interoperability, seamless interchangeability, and ease of configuration.
            • IsoPort™ 300 Load Port
              IsoPort IO Load Port

              IsoPort 300 Load Port

              Highly configurable, automated wafer-handling solution easily integrates with any tool. Many advanced benefits for both equipment makers and chipmakers transitioning to 300mm wafers.
          • Reticle Automation

            • ZARIS Reticle Automation System
              ZARIS Reticle Automation System

              ZARIS Reticle Automation System

              Reliably automates the handling of 5” and 6” reticles from a wide range of shipping and stepper cassettes.
            • Narrow Reticle Indexer
              Narrow Reticle Indexer

              Narrow Reticle Indexer

              Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.
            • Guardian Bare Reticle Stocker
              Guardian DM6

              Guardian Bare Reticle Stocker

              Fully automated, high-density storage system for 5" and 6" reticles. The Guardian completely isolates reticles from the surrounding environment featuring a unique design with a reticle "vault".
          • SMIF Solutions
            • SMIF Load Port Transfer (LPT)
              SMIF Loadport Transfer

              SMIF Load Port Transfer (LPT)

              Ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools.
            • SMIF-INX Indexers
              SMIF INX Indexers

              SMIF-INX Indexers

              Designed to supply wafer indexing for fixed Z-axis wafer handlers or cassette positioning to a fixed plan for Z-axis wafer handlers.
            • VersaPort™ 2200 Load Port
              VersaPort 2200 SMIF Load Port

              VersaPort 2200 Load Port

              The industry’s most advanced 200mm standard mechanical interface (SMIF) I/O processing tool with its load port opener. While designed as a “bridge tool” for 200mm to 300mm transitions, the VersaPort 2200 also offers a solution for open cassette to SMIF I/O processing.
            • ERGOSPEED II™ Load Port
              ERGOSPEED II

              ERGOSPEED II Load Port

              Highly reliable, ultra-clean 200mm SMIF load port solution for adaptive tool interface applications. Ensures maximum cleanliness within the cassette and wafer area to prevent contamination featuring the Brooks superior laminar airflow design.
            • SLR 200 M Series
              SLR 200 M Series SMIF

              SLR 200 M Series

              Allows manual loading and unloading of 8-inch standard SMIF pods containing a wafer or reticle cassette for fast, easy access.
        • Wafer Handling Robotics
          • Atmospheric Robots
            • Razor™ Atmospheric Transfer Robot
              Razor Robot FOUP

              Razor™ Atmospheric Transfer Robot

              Razor robots provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing operations. The Brooks kinematic mounting system, patented motion control technology, and reliable direct drive robotics, Razor robots enable fast set-up, high repeatability, and maximum uptime.
            • Yaskawa M112/M122 Robot
              Yaskawa Robots

              Yaskawa M112/M122 Robot

              Footprint optimal solution for small Equipment Front End Modules (EFEMs), especially when edge grip handling is required. The YEC SemiStar products are the benchmark for semiconductor industry EFEM solutions and are a key part of the Brooks Automation Atmospheric Robotics portfolio.
            • Yaskawa M201 Robot
              Yaskawa Robots

              Yaskawa M201 Robot

              Highly efficient, fast swap solution, especially when combined with linear motor track options. YEC SemiStar products are the benchmark for semiconductor industry EFEM solutions and are a key part of the Brooks Automation Atmospheric Robotics portfolio.
            • Razor™ Aligner
              Atmospheric Razor Aligner

              Razor Aligner

              High-performance atmospheric Razor Aligner provides ultra-precise wafer positioning of 200mm, 300mm, or 450mm wafers. Designed for optimal manufacturability, the Razor Aligner and other Razor modules provide high quality out of the box and support fast product installation and reduced lead time.
          • Vacuum Robots
            • MagnaTran® 7 BiSymmetrik™
              MagnaTran 7 BiSymmetrik Robot

              MagnaTran® 7 BiSymmetrik™

              The MagnaTran® 7 BiSymmetrik™ (MAG 7 B) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failure (MCBF) of > 11 million.
            • MagnaTran® 7 Frogleg™
              MagnaTran 7 Frogleg Robot

              MagnaTran® 7 Frogleg™

              The MagnaTran® 7 Frogleg™ (MAG 7 F) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
            • MagnaTran® 7 Leapfrog®
              MagnaTran 7 Leapfrog Robot

              MagnaTran® 7 Leapfrog®

              The MagnaTran® 7 Leapfrog® (MAG 7 X) robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications.
            • MagnaTran® 7 SCARA
              MagnaTran 7 SCARA Robot

              MagnaTran® 7 SCARA

              The MagnaTran® 7 SCARA (MAG 7) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
            • MagnaTran® 8 QuadraFly
              MagnaTran 8 QuadraFly Robot

              MagnaTran® 8 QuadraFly

              The MagnaTran® 8 QuadraFly robot leverages proven SCARA arm technology and reliable direct drive robotics to provide the simultaneous exchange of four wafers in vacuum within a small containment swing diameter.
            • MagnaTran® 8 Radius™
              MagnaTran 8 Radius Robot

              MagnaTran® 8 Radius™

              The dual arm MagnaTran® 8 Radius™ robot extends the benefits of MagnaTran field-proven direct drive technology to a tri-axial drive. In addition, the MagnaTran leverages proven SCARA arm technology to provide sub 4 second fast swaps within a small containment diameter.
          • Components
            • InLigner™
              Inligner

              InLigner

              The InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for 100 to 200 mm SEMI-standard and Jeida-standard wafers with either notch or flat edge fiducials. Special configurations are also available for use with transparent and/or square substrates, including quartz masks up to 6 inches square.
            • Fusion™ Controls
              Fusion Control

              Fusion Controls

              The industry’s most flexible and complete automation control solution. Fusion Controls deliver maximum performance and uptime. They are fully customizable and remarkably easy to use, while accelerating time to market and tool profitability.
        • Wafer Handling Systems
          • Vacuum Systems
            • VCE Load Locks
              VCE

              Vacuum Cassette Elevator (VCE) Load Locks

              Available in four styles to suit your wafer fabrication environment, the VCE 6 Vacuum Cassette Elevator load lock provides cost-effective, state-of-the-art factory interfacing to enable safe, clean AGV, RGV, or human operator transfer of up to 200mm SEMI standard wafer cassettes.
            • Marathon™ 2 Transport System
              Marathon 2

              Marathon 2 Transport System

              Brooks advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing and other complex manufacturing environments. We offer a range of systems—available in numerous configurations for 100mm to 450mm wafer transport—that meet specific manufacturing environment and process requirements.
            • Marathon™ Express
              Marathon Express

              Marathon Express Vacuum Transport System

              The Marathon Express® is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer size applications.
          • Atmospheric Systems
            • Jet™ Atmospheric Transport System
              Jet 2

              Jet Atmospheric Transport System

              Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes.
            • Spartan™ Atmospheric Transport System EFEMs
              Spartan EFEM

              Spartan Atmospheric Transport System EFEMs

              Brooks offers equipment manufacturers and chipmakers truly high-performance atmospheric equipment front-end solutions with its Spartan™ EFEM. Spartan EFEM delivers higher throughput, higher particle performance, optimized cleanroom space and lower cost of ownership (COO) with its simple, unified design.
            • Spartan™ 450mm Development Platform
              Spartan 450mm Development Platform

              Spartan 450mm Development Platform

              A unique, small footprint, low-cost system that allows original equipment manufacturers (OEMs) to reliably get wafers into and out of process chambers. This single FOUP EFEM accelerates OEMs 450mm development efforts by eliminating the need to spend engineering time on platform development.

    • Life Science Systems
      Featured Product
      Biostore Storage System
      BioStore™ Ultra Low Temperature
       
        • Life Science Systems
          • Compound Management & Sample Storage Systems
            • -20°C Small to Medium Standard
              Small to Medium Standard Storage Systems

              -20°C Small to Medium Standard Storage Systems

              With a focus on high storage densities, multi-format picking, modularity, flexibility and reliability, the Brooks automated sample storage and compound management range, comprising the Brooks SSS™, A3™ and Universal Labstore™ systems, is ideally suited for small to medium size sample collections.
            • -20°C Automated Large Scale Compound Storage
              -20°C Automated Large Scale Compund Storage

              -20°C Automated Large Scale Compound Storage

              Whether used for compound storage in the pharmaceutical or agrichemical sectors, or biological a biobank, Brooks storage solutions have served as the sample logistics backbones of some of the world’s largest life science and bio-repository organizations for since 1997.
            • BioStore™ -80° Automated Sample Storage Systems
              BioStore -80°C Automated Sample Storage Systems

              BioStore™ -80° Automated Sample Storage Systems

              Automated -80°C sample storage with guaranteed long term sample integrity achieved through stringent environmental controls, efficient sample processing  and system redundancy. Optimized storage density,  -80°C picking and flexibility for current and future collection changes.

          • Sprint 6 HTS Software
            Sprint 6 Scheduling Software for HTS Systems

            Sprint 6 Scheduling Software for HTS Systems

            Sprint 6™ dynamic scheduling software allows your organization to standardize on a single scheduler — regardless of your hardware supplier. With Sprint 6™, you can extend the useful life of your high throughput screening (HTS) systems, reduce training and maintenance costs and add value via new functionality.
        •  
          • Instruments & Devices
            • Celigo Imaging Cell Cytometer
              Celigo Cell Imaging Cytometer

              Celigo S Imaging Cell Cytometer

              The Celigo non-destructive and non-invasive brightfield analysis is complemented by multi-color fluorescence capabilities, making the system suitable for a wide variety of cell-based assays in any lab.
            • Tube Auditor
              Tube Auditor

              Tube Auditor

              The Brooks Tube Auditor performs quick and easy Goods-In and Goods-Out QA checks to help ensure that your suppliers are providing what you ordered and that your customers are receiving what you promised.
            • Plate Auditor
              Plate Auditor

              Plate Auditor

              Specifically designed for the detection and classification of features unique to HTS compound libraries. The Plate Auditor uses vision technology to identify empty wells / wells with insufficient volume of liquid compound sample, wells with colored compounds and wells with compound precipitation.
            • XPeel
              XPeel Automated Microplate Seal Removal

              XPeel Automated Microplate Seal Removal

              As the industry-standard automated microplate “de-sealer,” the Brooks XPeel provides the “gold standard” operating model (no lids) for automated seal removal to support reliable operation and maximize sample integrity.
            • HTS Systems & Workcells
              Sprint HTS Software

              HTS Systems & Workcells

              The Brooks HTS systems and work cells are designed with input from HTS labs in major pharma companies to ensure optimum usability. They provide a superior alternative to costly cart-based solutions that offer flexibility but make poor use of space and inflexible fixed instrument solutions that offer better instrument density and lower initial cost but are expensive to upgrade.
            • ABF Automated Blood Fractionation System
              ABF Automated Blood Fractionation

              ABF Automated Blood Fractionation System

              The Brooks ABF™ is more than a liquid handler with a vision system; it’s a complete solution for blood fractionation that provides a controlled environment, process validation and full audit trail. With the Brooks ABF, you can process unique blood samples with confidence that sample integrity will be preserved and your staff’s health will be protected.
            • Capping & Decapping
              Capping and Decapping tubes

              Capping & Decapping

              The REMP® capping system is the only tube capping system designed for automation. It is used widely for both biological and compound samples. The latest version is designed specifically to work down to -80°C.
            • Plate & Tube Sealing
              Easy Sealer

              Plate & Tube Sealing

              REMP® introduced the concept of automated storage of samples in heat sealed tubes. The technology has been widely adopted by leading pharma and biorepositories as the most secure way to store samples.
            • Seal Piercing
              Seal Piercing on Tubes and Plates

              Seal Piercing on Tubes and Plates

              The REMP® piercing lid range is unique – it offers the chance to pierce a foil seal with a wide hole for reliable liquid handling and, as the lids are disposable, there is no risk of cross-contamination. This range of devices allows for the simple operation of the piercing lids.
            • Data Matrix Code Reading
              Reatrix 2D DataMatrix Code

              Data Matrix Code Reading

              The Reatrix allows reading of REMP Storage Tube Racks with a 2D DataMatrix Code. Can be used in automated systems or as a standalone unit.
            • Tube Selecting
              Tube punching module

              Tube Selecting

              The tube punching module allows small collections or low throughput laboratories to automate the sample picking of REMP® 96-way tubes and REMP® 384-way tubes.
        •  
          • Consumables
            • Aurora High Performance Microplates
              Aurora Microplates

              Aurora High Performance Microplates

              High performance plate material as all Aurora microplates are made from cyclo-olefin polymer (COP). Assay miniaturization: 384, 1536 and 3456 formats. Aurora microplates are available with an evaporation barrier of sacrificial wells and a specially designed lid to minimize evaporation.
            • REMP® Tube Technology
              2D Code

              REMP Tube Technology

              REMP® storage tubes offer industry leading storage quality and are specifically designed for automation. They have been proven in use for over 10 years and are used by many of the world’s leading biobanks and compound management facilities.
            • REMP® Single Use Heat Sealed Tubes
              STBR96 caps

              REMP Single Use Heat Sealed Tubes

              Providing the highest integrity of any capping or sealing system, it saves significantly on the space taken by a traditional cap. Single use tubes provide an efficient workflow and the tube sealing system is available on all tubes in the range from working volume of 40µl to 900µl.
            • REMP® Capped Tube System
              96-way Tubes capped

              REMP Capped Tube System

              Applications include compound and DNA storage, both working and stock solutions as well as other biological liquids such as serum and other blood components.
            • REMP Storage Microplates
              REMP Storage Plate

              REMP Storage Microplates

              Designed for heat sealing: Discrete raised rims around each well - reduces the risk of cross-contamination. Suitable for REMP® piercing lid system. 384 square well micro volume Storage Plate, SBS footprint. Maximum well volume of 128 µl / working volume 110 µl.
            • 96 Way Tubes
              96-Way Tubes

              96 Way Tubes

              Tubes that don't fall out as standard. Tubes may either be capped or heat sealed (REMP® Capped Tube System and Single Use Heat Seal). 100% read validation. 100% leak tested. Tubes are manufactured from medical grade polypropylene; free of detectable DNA, DNase/RNase, PCR inhibitors, ATP, pyrogens.
            • 384 Way Tubes
              384-Way Tubes

              384 Way Tubes

              Single-use, low cost per tube. Working volume of up to 40 µl and minimal dead volume of 2 µl. Tubes are manufactured from medical grade polypropylene; free of detectable DNA, DNase/RNase, PCR inhibitors, ATP, pyrogens.
            • REMP®Tube Caps
              Grey tube caps

              REMP Tube Caps

              REMP® tube caps are designed for automation. Read more about the REMP Capped Tube System. EMP® tube caps are available in ready caped tubes or in capmats.
            • REMP® Heat Seals
              REMP Thermo Heat Seals

              REMP Heat Seals

              REMP® offers a range of Thermo-Seal materials for different applications. Rolls have a capacity of 5,000 plates / tubes racks. Sheets are sold in boxes of 100.
            • Lids & Piercing Lids
              Lids and Piercing Lids

              Lids & Piercing Lids

              Piercing lids are designed for use with single use heat sealed tubes and other sealed containers (eg REMP® storage microplates). Lids are free of detectable DNA, DNase/RNase, PCR inhibitors, ATP and pyrogens.

    • Gas Analysis &
      Vacuum Measurement
      Featured Product
      835 Vacuum Quality Monitor
      835 Vacuum Quality Monitor (VQM™)
       
        • Brooks Granville-Phillips Products
          • Vacuum Quality Monitor Systems
            • 835 Vacuum Quality Monitor (VQM™)
              835 Vacuum Quality Monitory System

              835 Vacuum Quality Monitor (VQM™)

              Combines the highest performance gas analysis technology with intelligent functional design that transforms complex measurement into actionable information. The 835 VQM is the world’s fastest, lowest power mass spectrometer with full data collection, spectral deconvolution, and data logging at 85 ms capture rates for the full 1-145 amu measurement range or 125 ms for 1-300 amu.
            • 835 VQM Differential Pump System
              835 VQM DPS

              835 VQM Differential Pump System

              Extends the vacuum pressure range of the award-winning, high performance Vacuum Quality Monitor (VQM™) to address the needs of process monitoring and process control applications at pressures up to 3 Torr. All the benefits of the VQM, including speed and ease of use, can now be used to optimize PVD, ion implant, coating, and other vacuum processes to increase productivity, improve results, and save money.
          • Vacuum Gauge Modules
            • 275 Mini-Convectron® Modules
              275 Mini-Convectron Modules

              275 Mini-Convectron® Modules

              275 Mini-Convectron Modules combine the industry-standard Convectron® gauge with electronics in a compact, modular design. They are capable of measuring from atmosphere to 1x10-3 Torr (1x10-1 Pa).
            • 347 Stabil-lon® Modules
              347 Stabil Ion Modules

              347 Stabil-lon® Modules

              347 Stabil-Ion Modules mount the controller electronics directly on the gauge. The Stabil-Ion module makes all the features and benefits of the Stabil-Ion gauge available in a modular device.
            • 354 Micro-Ion® Modules
              354 Micro-Ion Modules

              354 Micro-Ion Modules

              354 Micro-Ion modular vacuum gauges are a convenient and reliable solution for applications that do not need front panel displays and controls. These compact, cost-saving modules have the control electronics mounted directly on the gauge.
            • 356 Micro-Ion® Plus Modules
              356 Micro-Ion Plus Modules

              356 Micro-Ion® Plus Modules

              356 Micro-Ion Plus Vacuum Gauge Module combines the new miniature Conductron® Heat-Loss Sensor with proven Micro-Ion Gauge technology in the same vacuum envelope to extend pressure measurements from high vacuum to atmosphere. The Micro-Ion Plus design combines the control electronics and the gauge in a compact module that not only provides convenient high vacuum measurement, but is easy to interface to a control system.
            • 385 Convectron® ATM Module
              385 Convectron ATM Module

              385 Convectron® ATM Module

              Combines a piezo-resistive diaphragm with a proven Convectron sensor to provide a continuous measurement from low vacuum to atmosphere as well as setpoint relay activation at a defined differential pressure from atmosphere.
            • 390 Micro-Ion® ATM Modules
              390 Micro-Ion ATM Modules

              390 Micro-Ion® ATM Modules

              The 385 Micro-Ion ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere.
            • 392 Micro-Ion® Plus Modules
              392 MicroIon Module

              392 Micro-Ion® Plus Modules

              The 392 Micro-Ion Plus Series is a second-generation full range pressure measurement module that combines industry-standard Micro-Ion ionization gauge technology with a miniature Pirani Conductron® heat-loss sensor to provide accurate, continuous pressure measurement from high vacuum to atmosphere.
        •  
          • Vacuum Gauges
            • 274 Glass Bayard-Alpert Type Ionization Gauges
              274 Glass Bayard Alpert Type Ionzation Gauges

              274 Glass Bayard-Alpert Type Ionization Gauges

              Granville-Phillips glass Bayard-Alpert ionization gauges have a bifilar grid and either a burn-out resistant filament or dual tungsten filaments.
            • 274 Nude Bayard-Alpert Type Ionization Gauges
              274 Nude Bayard Alpert Type Ionization Gauges

              274 Nude Bayard-Alpert Type Ionization Gauges

              Nude Bayard-Alpert ionization gauges are available in two types: a single thoria-coated iridium filament gauge and a dual filament UHV gauge.
            • 275 Convectron® Pirani Gauges
              275 Convectron Gauges

              275 Convectron® Pirani Gauges

              The Granville-Phillips industry-standard convection-enhanced Pirani gauge provides reliable measurement from atmosphere to 10-4 Torr (10-2 Pascal). Its high accuracy and repeatability help to ensure that processes start at the desired pressure — time after time.
            • 355 Micro-Ion™ Gauges
              355 Micro-Ion Gauges

              355 Micro-Ion™ Gauges

              355 Micro-Ion gauges are smaller, more rugged, and wider range than glass gauges. In addition, they generate less heat and provide greater burnout resistance.
            • 370 Stabil-Ion™ Gauges
              370 Stabil Ion Guage

              370 Stabil-Ion™ Gauges

              Stabil-Ion gauges feature an all metal gauge tube that eliminates glass breakage, glass decomposition, or helium permeation. A complete electrostatic shield and grounded metal gauge tube housing provide a stable electrical environment and shield against external electrical influences.
        •  
          • Vacuum Gauge Controllers
            • 307 Bayard-Alpert
              307 Bayard Alpert Gauge Controllers

              307 Bayard-Alpert Gauge Controllers

              The 307 Bayard-Alpert Gauge Controller measures pressure and utilizes pressure-related outputs to control a variety of vacuum system functions and processes. The controller is available in a variety of configurations and prices to meet your application needs and resources.
            • 316 Low Vacuum Gauge Controllers
              316 Low Vacuum Gauge Controller

              316 Low Vacuum Gauge Controllers

              The 316 Low Vacuum Gauge Controller operates Convectron®, thermocouple and capacitance manometer gauges and reads pressure from 990 Torr to 1 x 10-4 Torr.
            • 350 Bayard-Alpert UHV Gauge Controllers
              350 BayardAlpert UHV Gauge Controller

              350 Bayard-Alpert UHV Gauge Controllers

              The 350 Bayard-Alpert UHV Gauge Controller operates a Series 274 nude Bayard-Alpert type ionization gauge in a compact half-rack design.
            • 358 Micro-Ion® Gauge Controller
              358 MicroIon Gauge Controller

              358 Micro-Ion® Gauge Controller

              Granville-Phillips all-metal Micro-Ion Gauges with dual ion collectors provide a wide range of measurement in a miniature design for greater mounting flexibility. Micro-Ion gauges with operated with this rack-mount controller deliver unmatched ionization gauge performance. The basic controller operates one Micro-Ion Gauge with electron bombardment degas and remote control standard.
            • 370 Stabil-Ion® Gauge Controller
              370 Stabil Ion Gauge Controller

              370 Stabil-Ion® Gauge Controller

              The all-metal 370 Stabil-Ion® Gauges operated with this rack-mount controller provide unmatched ionization gauge performance. The 370 delivers the long-term performance of a spinning rotor gauge at a fraction of the cost using calibration on a chip.
            • 475 Convectron® Gauge Controller
              475 Convectron Gauge Controller

              475 Convectron® Gauge Controller

              The Series 475 Convectron Vacuum Gauge Controller combines the industry-standard Convectron gauge technology with high-performance controller electronics and an easy-to-use interface — all in a compact package design.
          • Variable Leak Valve
            Variable Leak Valve

            Variable Leak Valve

            The Variable Leak Valve seals the mass spectrometer leak tight. They are constructed entirely of low vapor pressure metals to ensure minimum contamination.

    • Cryopumps, Cryochillers &
      Compressors
      Featured Product
      On-Board IS Cryopump
      On-Board® IS Cryopumps
       
        • Brooks CTI-Cryogenics & Polycold
          • Cryopumps
            • On-Board® IS Cryopump Systems
              On-Board IS 320 Cryopump

              On-Board® IS Cryopump Systems

              Intelligent On-Board IS cryopump systems leverage innovative high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency.
            • On-Board® Cryopumps
              On-Board IS Cryopump

              On-Board® Cryopumps

              On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
            • Cryo-Torr® Cryopumps
              CryoTorr 8 Cryopump

              Cryo-Torr® Cryopumps

              Cryo-Torr Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications. For added flexibility, you can add your own customized controls and supporting peripherals to meet your specific application needs.
            • On-Board® Waterpumps
              On-Board Waterpumps

              On-Board® Waterpumps

              On-Board Waterpumps are high-performance vacuum pumps that increase water vapor pumping speeds to substantially improve system throughput and provide better process results.
            • PFC Water Vapor Cryopump
              PFC Polycold

              PFC Water Vapor Cryopump

              The Brooks Polycold® PFC Water Vapor Cryopump effectively captures water vapor, which typically comprises 65% to 95% of the gas load in high vacuum systems. It pumps vapor within minutes of “start,” defrosts in less than four minutes, and lowers water vapor partial pressure during processing for higher quality, better adhesion, and more reproducible deposition.
        •  
          • Cryochillers & Compressors
            • P-102 Cryochiller
              P-102 Cryochiller

              P-102 Cryochiller

              Provides a compact, easy-to-use alternative to liquid nitrogen in small vacuum systems. These cryogenerators effectively eliminate the cost, inconvenience, and hazards associated with using liquid nitrogen — while delivering comparable performance.
            • PGC Gas Chillers
              PGC Polycold

              PGC Gas Chillers

              PGC Gas Chillers cool compressed dry gases, such as nitrogen, argon or air, from ambient to cryogenic temperature without pre-cooling. PGC Gas Chillers are closed-loop refrigeration systems that cool a non-recirculating gas stream using a refrigerant to gas tube-in-tube heat exchanger.
            • PGCL Closed Loop Gas Chillers
              PGCL Polycold Chiller

              PGCL Closed Loop Gas Chillers

              PGCL Closed Loop Gas Chillers incorporates both a closed-loop refrigerating system and a re-circulating gas coolant system, making them capable of cooling a gas stream to temperatures below -100°C using highly efficient refrigerant heat exchangers.
            • PCC Compact Coolers
              Polycold PCC Component Cooler

              PCC Compact Coolers

              The PCC Compact Cooler is a compact, high-performance cooling system that brings new levels of efficiency and reliability to demanding applications such as high-resolution digital imaging, analytical chemistry, life sciences, materials analysis, semiconductor inspection, scientific research and water vapor cryotrapping.
            • XC Cryochiller
              XC Cryochiller

              XC Cryochiller

              XC Cryochiller is the next generation PFC platform that builds on the Polycold long history of quality, reliability, and innovation, providing a multi-purpose cooler with industry-leading performance, state of the art controls, and environmentally responsible technology.
            • Cryodyne Refrigerators
              Cryodyne Refrigerator

              Cryodyne Refrigerators

              Cryodyne Refrigeration Systems are a family of two-stage, closed-cycle helium refrigeration systems based on the Gifford-McMahon thermodynamic cycle. They offer usable heat lift from <10K to >80K, making them highly suitable for a variety of commercial and research applications.
            • Compressors
              Cryo Compressor

              Compressors

              Brooks CTI-Cryogenics offers a choice of compressors designed to provide optimum performance with On-Board Cryopumps, Cryo-Torr Cryopumps and/or On-Board Waterpumps. An integrated cryopump power frequency converter assures maximum cryopump performance in both 50 and 60 Hz applications for all Brooks vacuum pumps.
            • Refrigerant Replacement Charges

              Refrigerant Replacement Charges

              Lookup the refrigerant replacement charge part number for your model number to place an order.

        •  

    • Asset Tracking
      Featured Product
      Smart Tag 8200 8400 Family
      Smart Tag 8200 & 8400 Family
       
        • Infrared & RFID Asset ID Products
          • Smart Tag Infrared 8200 and 8400 Family
            Smart Tag 8200 8400 Family

            Smart Tag Infrared 8200 and 8400 Family

            The Brooks Auto ID System is the leading automated carrier ID system used in automated semiconductor fabs today. It combines the latest display, logic, and communication technologies and provides a versatile electronic run card. The system offers solutions to track, identify and manage Front-Opening-Unified-Pods (FOUPs), SMIF-Pods, cassettes, reticles, operators, and probe cards.
          • Low Frequency RFID Solutions
            • AdvanTag™ 9100 & 9800 Family
              AdvanTag 9100 9800 Family

              AdvanTag 9100 & 9800 Family

              The Brooks Auto ID System is the leading automated carrier ID system used in automated semiconductor fabs today. It combines the latest display, logic, and communication technologies and provides a versatile electronic run card. The system offers solutions to track, identify and manage Front-Opening-Unified-Pods (FOUPs), SMIF-Pods, cassettes, reticles, operators, and probe cards.
            • LF80 Mid Range Systems
              LF80C RFID Reader ZenID

              LF80 Mid Range Systems

              • ZeniD RFID Reader - Uses the frequency LF 134.2 kHz and communicates with TIRIS™ transponders.
              • LonWorks RFID Reader - Multiple LEDs LEDs provide information on the current operational mode, voltage, antenna mode and read/write status as well as displaying I/O signals.
              • Profibus RFID Reader - Communicates with passive transponders using the frequency LF 134.2 kHz.
            • LF60 Short Range Systems
              LF60 Short Range RFID Systems

              LF60 Short Range Systems

              Communicates with passive TIRIS™ transponders on an LF frequency of 134.2 kHz. Captured data are sent via a serial interface (RS232) to the higher-level system.
            • LF40 Handheld Solutions
              LF40 RFID Reader THR

              LF40 Handheld Solutions

              Easy-to-operate read/write device to transfer transponder data to a computer for users who want to replace barcodes with RFID.
            • LF Antennas
              LF RFID Antenna

              LF Antennas

              Low Frequency Antennas are suitable for RFID Readers series LF (134,2 kHz). We offer multiple antennas either in rod or frame format.
            • Evaluation Kits
              RFID Evaluation Kit LF

              Evaluation Kits

              Designed for quick and easy implementation, the Evaluation Kit includes a complete system for immediate launching RFID technology. Ideal for small, focused deployments, this RFID kit enables to effective and affordable demonstration with your current business processes while laying the groundwork for a cost-effective upgrade path.
        •  
          • High Frequency RFID Solutions
            • HF80 Mid Range Systems
              HF80 RFID Reader Serial

              HF80 Mid Range Systems

              • Mid-Range RFID Reader - Differing plug & play antennas are also available, thus making it possible to find the optimal antenna configuration for every application. Transponders in conformity with ISO 15693 are identified (optional EEPC-transponder).
              • Profibus RFID Reader - Stationary RFID Reader. Profibus DP Interface. 5 Antenna ports. Test mode. Optionale I/Os. Durable aluminum housing.
            • HF60 Short Range Systems
              HF RFID Reader SAV

              HF60 Short Range Systems

              • IAE RFID Reader - Transfers the identified data either through a serial RS232 or an Ethernet interface. Numerous plug and play antenna types enable the system to adjust to different reading distances and applications.
              • SAV RFID Reader - The device disposes of a PoE compatible (Power-over-Ethernet) connection and is also available as a wireless version.
            • HF40 Handheld Solutions
              HF40 RFID Handheld Reader

              HF40 Handheld Solutions

              The device with keyboard emulation can be connected to a PC via USB. The reader automatically detects the driver and subsequently starts installation.
            • HF30 OEM Module
              HF30 OEM Module AJ

              HF30 OEM Module

              RFID OEM Module AJ supports transponders and smart labels using frequency 13.56MHz according to ISO Standard 15693.
            • HF20 Customized Solutions
              HF20 RFID Reader USB

              HF20 Customized Solutions

              This reader offeres a practical, effective and downright cost-attractive means of adding RFID capability to a PC. Fast and fuss-free, the PC is able to communicate with transponders and exchange data.
            • HF Antennas
              HF RFID Antenna

              HF Antennas

            • HF Evaluation Kits
              RFID Evaluation Kit HF

              HF Evaluation Kits

              Delivery includes one HF reader with serial interface, several antennas and a choice of RFID transponders. The RFID antennas may concurrently work with the reader which provides porting facilities for up to five antennas.
        •  
          • Ultra High Frequency Solutions
            • UF80 RFID Reader
              UF80 RFID Reader Standard

              UF80 RFID Reader

              Operating status is indicated by three integrated LEDs. The reader also has three other outputs that can be enabled by protocol commands.
            • UF70 Certum RFID Reader
              UF70 Reader Certum

              UF70 Certum RFID Reader

              Offers a broad range of applications by combining modularity and high performance at low investment costs. It comes with configuration software that allows a wide range of parameter settings for an individual adaption.
          • Work In Process Solutions
            • WIP Rack WRD HF20 "PlaceNGo"
              HF20 RFID WIP Rack

              WIP Rack WRD HF20 "PlaceNGo"

              Intelligent WIP rack with RFID functionality HF20 WRD storage solution. It serves for managing and storing 200mm boxes and lots between individual process steps (customization to different 300mm FOUPs is possible).
            • WIP Trolley HF20 "Where2Go"
              HF20 RFID WIP Trolley

              WIP Trolley HF20 "Where2Go"

              Trolley with integrated RFID system. No-power display. User navigation with buttons. Battery operation min 24h. Presence sensor. Identifies 200mm Lots and transport boxes Frequency 13,56 MHz. HSMS interface / WLAN connection.

    • Alignment & Calibration Tools
      Featured Product
      Alignment & Calibration LP 3004
      Load Port Checker
       
        • Alignment & Calibration Tools
          • Load Port Alignment Tools
            • Load Port Checker
              Alignment Tools

              Load Port Checker

              The Load Port Checker LP-3004 inspects 16 parameters for load port alignment. The “real-time” display screens allow for fast, accurate load port setups, while on-screen instructions guide the technician through adjustments. “Report Card” screens provide for quick and easy inspections, minimizing operator errors.
            • Load Port Force Gauge
              FG 3000

              Load Port Force Gauge

              The FG-3000 load port force gauge allows you to measure load port docking force and door closure force to insure load port and FOUP interoperability. This is particularly critical with older load ports designed under less demanding SEMI load port force requirements. Simply place the unit on the kinematic pins, dock and/or close, and take your reading to insure compliance with current manufacturer recommendations.

          • Robot Alignment Tools
            • 150mm, 200mm, 300mm
              Robot Aligner 200mm RC-2005

              Robot Alignment Tools - 150mm, 200mm, 300mm

              Stop “eyeball” alignments! Brooks ALIGN series of alignment tools provide a fast, repeatable, and highly accurate method of aligning your wafer handling equipment. Optimized for cluster tools, the RC-2004 200mm Robot Alignment Tool increases your yield and throughput with more accurate alignments while saving up to 75% of the time required by “eyeball” alignments.

              ▶ 150mm (RC-1504)  ▶ 200mm (RC-2004)  ▶ 200mm (RC-2005)  ▶ 300mm (RC-3003)
          • Electronic Levels
            • Wafer Levels
              EL Series 4700 Electronic Level

              Wafer Levels

              Matching the weight of a silicon wafer, this versatile tool’s design allows use on end effectors and wafer handling blades as well as in wafer cassettes and quartz boats. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screen simplify operation, while the remote real-time display is convenient for remote adjustments.
            • Spot Level
              EL-5003 Electronic Spot Level

              Spot Level

              Designed as a versatile electronic level, this “spot” level can easily check level at 0 degrees, 90 degrees, and 180 degrees. A mounting-hole pattern can be used to attach the EL-5003 to your reference surface or substrate. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screens simplify operation, while the remote real-time display is convenient for making equipment adjustments.
            • Reticle Level
              EL-5003 Reticle

              Reticle Level

              Designed to match a 150 mm reticle, this “reticle” level can easily measure robots and reticle positions for level or co-planarity. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screens simplify operation, while the remote real-time display is convenient for making equipment adjustments.
            • Kinematic Pin Level
              EL-5003-KP

              Kinematic Pin Level

              Designed to rest on SEMI standard kinematic pins, this specialized level can accurately measure your load port’s level or co-planarity (or that of many other interfaces). A remote touch-screen display with real-time graphic and numeric data provides simplicity, accuracy, and flexibility.
          • Setup Wafers
            • Carbon Fiber Dummy Wafers
              CF Series Carbon Fiber Dummy Wafers

              Carbon Fiber Dummy Wafers

              Set up and cycle test your equipment without breaking silicon wafers. This high-tech carbon fiber composite wafer is virtually indestructible and is manufactured to SEMI-standard diameter, flatness and notch specifications. Carbon fiber dummy wafers are also designed to mimic the weight and structural characteristics of silicon wafers.
            • Glass Target Wafers
              TW Series Glass Target Wafers

              Glass Target Wafers

              Available in 125, 150, 200, 300 and 450 mm sizes. Manufactured from clear, precision ground glass. Precision markings placed on the wafer at every 2.5mm. Opaque perimeter allows the edge to be detected by wafer handling equipment. “Virtual” notch allows for compatibility with tools that require a notch.
          • Cassette Checkers
            • 150mm & 200mm Cassette Checkers
              MC-1512

              150mm & 200mm Cassette Checkers

              The 200mm MC-2000 and 150mm MC-1512 Cassette Checkers offer a quick answer to the question, “Is it the tool or the cassette?” Quit throwing good cassettes away. Quit finding bad cassettes by wasting good production wafers. Start checking your cassettes the sensible way — with the MC-1512 150mm or MC-2000 200mm Cassette Checkers!
          • Alignment & Calibration Services
            spacer10

            Alignment Calibration Services

            • Reduced Unscheduled Downtime
            • Traceable, numeric data during all phases of tool deployment
            • Faster, more accurate tool alignment
            • Objective and data driven process
            • Increased Mean Cycle Between Failure (MCBF)
            • Improved wafer handling and reduced wafer scratching
            • All service work is done by experts
            • Attractive service pricing
        • Interface Adapters
          • Wafer Adapters in FOUP
            • For 300mm FOUPs
              AM-3005

              100mm, 150mm and 200mm Wafer Adapters in 300mm FOUPs

              • Constructed from anodized aluminum and high-temperature thermoplastics.
              • Retention features secure the adapter firmly, yet allow for easy removal.
              • Compatible with FOUPs from all manufacturers.
              • 25 wafer capacity.
              • Able to adjust wafers to forward or center position.
              • Maintains wafer plane.
            • For 450mm FOUPs
              AM-4500 300mm Wafer Adapter for 450mm FOUPs

              Wafter Adapter for 450mm FOUPs

              • Constructed from anodized aluminum and high-temperature thermoplastics.
              • Retention features secure the adapter firmly, yet allow for easy removal.
              • Compatible with FOUPs from all manufacturers.
              • 25 wafer capacity.
              • Able to adjust wafers to forward or center position.
              • Maintains wafer plane.
          • Cassette Adapters
            • in 300mm Load Port
              AM-3006 Cassette Adapter in 300mm Load Port

              Cassette Adapter in 300mm Load Port

              Handling 300mm wafers is expensive! The Brooks AM-3006 wafer adapter allows 200mm wafers to be handled on a 300mm load port — saving you money! Simply place the unit on the kinematic pins and place a 200mm open cassette on the adapter. Remove the adapter at any time to return to 300mm capability.
            • in 300mm FOUP
              AM-3004

              Cassette Adapter in 300mm FOUP

              The Brooks cassette adapter allows a cassette with 200mm wafers to be handled inside a 300mm FOUP. Simply slide the unit in and start reducing your wafer costs. Remove the adapter at any time to return to 300mm capability.
          • 300mm Universal Adapter
            AM 3010

            300mm Universal Adapter

            The AM-3010 wafer adapter allows 300mm, 200mm, 150mm, and 100mm cassettes to be processed inside a 300mm FOUP style microenvironment, all with standard 300mm equipment. Using the same system for all wafer sizes expands the capability of 300mm equipment and saves time and money. Simply place the unit on your load port to handle the various wafer sizes and cassettes. 300mm can also be handled inside the adapter in an open cassette, or remove the adapter at any time to return to 300mm FOUPs.
          • 11mm Lift Adapter for 300mm Cassettes
            AM 3003

            11mm Lift Adapter for 300mm Cassettes

            This simple adapter allows you to quickly change from 300mm FOUPs to a 300mm process or shipping cassette without re-teaching your equipment. Simply place the adapter between the cassette and kinematic pins and run wafers. Then remove the adapter to immediately return to using a FOUP.
        • Interface Tools
          • Cassettes Carriers
            • 300mm Metal Cassettes
              CA-3000 300mm metal cassette

              300mm Metal Cassettes

              The CA-3000 is a 300mm metal cassette designed to support manual and automated handling and withstand high temperature applications. The exceedingly open design facilitates convective flow in thermal applications, yet the form factor is designed in accordance with SEMI FOUP specifications. This allows the cassette to support the full array of manual and automated handling without requiring changes to equipment settings.
            • Reticle Cassettes
              CA-2004 Reticle Cassette Carrier

              Reticle Cassettes

              The CA-Series reticle cassettes are designed to allow handling of reticles in a wafer cassette form factor compatible with pods and general cassette platforms. The CA-2004 is one such cassette which accommodates 152mm reticles in a 200mm cassette form factor. This allows reticle handling to be done with standard semiconductor automation components including 200mm SMIF robots. It is compatible with all 200mm SMIF pods as well as open cassette platforms.
            • Film Framer Shipper
              FFS Series Film Frame Shipper

              Film Framer Shipper

              Looking for a way to get your inventory to back-end facilities after thinning operations have been completed? The 300 mm Film Frame Shipper uses engineering plastics to transport 25 frames in an ergonomic container. The SEMI standard carrier follows the E1.9 and E47 specifications by using kinematic coupling registration to repeatably align your process carrier.
          • Kinematic Pins & Standard Platforms
            • 300mm Kinematic Pin
              KP 3000 Kinematic Pin

              300mm Kinematic Pin

              The KP-3000 Kinematic Coupling Pins, one of the Brooks INTERFACE series of products, have been designed to reduce your interface problems. Manufactured to strict SEMI standards, our kinematic coupling pins provide you peace of mind. Neatly packaged sets of three matched pins are available in either press-fit or threaded configurations.
            • 450mm Kinematic Pin
              KP 4500 Kinematic Pin

              450mm Kinematic Pin

              The KP-4500 Kinematic Coupling Pins, one of the Brooks INTERFACE series of products, have been designed to reduce your interface problems. Manufactured to strict SEMI standards, our kinematic coupling pins provide tight tolerances and peace of mind. The 450mm kinematic pins are available in two designs – a fixed 25mm height and an adjustable height version with a unique mounting and locking mechanism. Both versions are offered in neatly packaged sets of three matched pins.
          • Manual Pod Openers
            • 150mm SMIF Pod Opener
              MPO 1501 Manual Pod Opener

              150mm SMIF Pod Opener

              The MPO-1501 150mm SMIF Reticle Pod Opener provides precision manual opening and closing of 150mm wafer and reticle SMIF pods. Place it on, or mount to, work benches, WIP racks, or carts. Ergonomic in design and use, the MPO-1501 is a perfect addition to your fab.
            • 200mm SMIF Pod Opener
              MPO 2000 Manual Pod Opener

              200mm SMIF Pod Opener

              The MPO-2000 200mm SMIF Pod Opener provides precision manual opening and closing of 200mm SMIF pods. Place it on, or mount to, work benches, WIP racks, or carts. Ergonomic in design and use, the MPO-2000 is a perfect addition to your fab.
            • 300mm FOUP & FOSB Opener
              MPO 3002 Manual Pod Opener

              300mm FOUP & FOSB Opener

              The MPO-3002 300mm FOUP Opener is an ergonomically designed manual 300mm door opener for 25- and 13-capacity FOUPs and FOSBs. A short turn of the handle simultaneously opens both FOUP door locks. Positive stops hold the MPO-3002 in its fully open or fully closed position.

  • Applications By Industry
    • Display Manufacturing

    • General Vacuum

    • LED

    • Life Science
        • Life Science Applications
          • Small Molecule Drug Discovery
            • Compound Management
            • QA Tools
            • Toxicology
          • Biological Sample Management
            • ULT Storage
            • Blood Fractionation
        •  
          • High Throughput Screening
          • Biopharmaceutical Drug Discovery
            • Cell Health
            • Cell Secretion Analysis
            • Clonal Validation and Expansion
          • Cell Management & Cell Cytometry
            • Cell Counting
            • Confluency Measurement
            • Fluorescence Imaging & Bright Field Analysis
            • Marker Analysis
            • Cell Morphology Based Screening
            • Multi Parameter Gating
            • Cell Based Assays
        •  
          • Cancer Research
            • Cell Cycle Analysis
            • Label Free Growth Tracking
            • Multi Parameter Gating
            • Proliferation Assay
            • Tumor Sphere Analysis
            • Cell Based Assays
          • Stem Cell Research
            • Embryoid Body Counting

    • Asset Tracking & RFID
        • Asset Tracking & RFID
          • Solutions by Industry
            • Manufacturing Automation
            • Automotive
            • Professional Clothing
            • Retail & POS
            • Healthcare Institutions
            • Foods
            • Access Control
        •  
          • RFIDeas for Retail Terminals
            • The Perfect Sommelier
            • The Intelligent Fitting Room
            • The Tell2Sell Shoe Shelf
        •  
          • RFID Basics
            • Glossary
            • Components
            • Costs
            • Advantages
            • History
            • Applications
            • Frequencies
            • Standards

    • Semiconductor

    • Wafer Level Packaging

  • Services
    • Contact Customer Care

    • Repairs & Exchanges
        • Repairs & Exchanges
          spacer10

          Repairs & Exchanges

          Fixed Price Repair program for atmospheric and vacuum robots, vacuum gauges, controllers, monitors and cryopumps.

          • Global Repair Locations
            Repair locations in the United States, Europe and Asia.
          • Copper Segregation

            Prevent the contamination of non-copper processes and the equipment used in those processes.


    • Robot Repairs & Exchanges
      Featured Service
      MagnaTran 8 Robot
      Robot Repairs, Exchanges & Refurbishment
       
        • Robot Repairs & Exchanges
          • Vacuum Robots
            • MagnaTran 7
              MagnaTran 7 Vacuum Robot

              MagnaTran 7

              The MagnaTran® 7 (MAG 7) robot is the most advanced and reliable robot for operation in vacuum and isolation environments such as cluster tools. Reliability is proven at > 11.5 MCBF. With the MagnaTran 7 lengthy repair cycle times can lead to increased costs and unscheduled downtime. This is why Brooks created a Fixed Price Repair program to support the MagnaTran 7 robot.
            • MagnaTran 8
              MagnaTran 8 Robot Repair

              MagnaTran 8

              Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the MagnaTran 8 family of vacuum robots.
            • VAC 407
              VAC 407 Robot

              VAC 407

              Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the VAC-407 vacuum robot.
        •  
          • Atmospheric Robots
            • AcuLigner
              Aculigner Robot

              AcuLigner

              The AcuLigner™ atmospheric robot is an integral part of the Brooks Automation high performance atmospheric wafer handling solutions. Utilizing direct drive technology and on-board controls, these systems play a key role in your performance and productivity. Extensive downtime due to repair is not an option. That’s why Brooks has created a Fixed Price Repair program to support the AcuLigner product.
            • AcuTran AquaTran
              AquaTran Robot Repair

              AcuTran AquaTran

              Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the AcuTran/AquaTran 7 family of robots.

            • MultiTran 5 VacuTran 5
              MultiTran VacuTran Robot Repair

              MultiTran 5 / VacuTran 5

              The MTR 5 M model MultiTran® 5 robot with the Brooks patented BiSymmetrik™ arm and dual SEMI/MESC compatible end effectors is a vacuum wafer handling robot which enables high throughput handling in isolated cluster tools.

              The VTR 5 M model VacuTran™ 5 robot is a high reliability wafer-handling robot with a SEMI/MESC compatible arm and end effectors. The VTR 5 M is a top mounting robot with a single arm configuration for application in large transport chamber modules such as those in cluster tools. 
            • Reliance ATR 8
              Reliance Robot Repair

              Reliance ATR 8

              With the Reliance ATR, lengthy repair cycle times can lead to increased costs and unscheduled downtime. For this reason Brooks has developed a Fixed Price Repair program to support the Reliance ATR.
        •  
          • Equipe / PRI Robots
            • AxM 100/200/400
              Equipe PRI AxM Robot

              AxM 100/200/400

              • One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
            • DBM 2400/2700
              Equip PRI DBM Robot Repair

              DBM 2400/2700

              • One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
            • PRE-200™ PreAligner
              Equipe PRI PreAligner

              PRE-200™ PreAligner

              • One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs

               

        •  
          • Robot Controllers
            Robot Controllers

            Robot Controllers

            Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the robot controllers, to work with the AXM, DBM, AquaTran™/AcuTran® and Reliance™ ATR™ robot families.

    • Cryopumps & Compressors
      Repairs & Refurbishment
      Featured Service
      CryoTorr 8
      Cryo-Torr Repair
       
        • Cryopumps & Compressors
          Repairs & Refurbishment
          • CTI-Cryogenics
            Repair locations in the United States, Europe and Asia.
            • Cryo-Torr® Cryopumps
              CryoTorr 8 Cryopump

              Cryo-Torr® Cryopumps

              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
            • On-Board® Cryopumps
              On-Board IS Cryopump

              On-Board® Cryopumps

              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
            • On-Board® IS Cryopumps
              On-Board IS 320 Cryopump

              On-Board® IS Cryopumps

              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
            • Compressors
              Cryo Compressor

              Compressors

              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels

    • Services
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        • Upgrade Services
          • CTI-Cryogenics
            • Cryo Implanters Upgrades
            • Cryo PVD Upgrades
        • Spare Parts

  • Support & Training
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        •  
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    • About Brooks
      About Brooks
      Brooks Automation HQ Chelmsford MA USA
       
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          •  
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    • Contact Us & Global Offices
      Contact Us
      Brooks Automation HQ Chelmsford MA USA
       
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      Brooks Automation HQ Chelmsford MA USA
       
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      Brooks Automation HQ Chelmsford MA USA
       
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      Brooks Automation HQ Chelmsford MA USA
       
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    Brooks Automation, Inc.
    Brooks Automation HQ Chelmsford MA USA
     
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