M330™ Fully-Automatic FOUP/Pod Cleaner
The M330 Cleaner is a world-class fully-automatic FOUP-compatible system that provides superior washing and drying performance, operational ease and cost-efficiency.Learn More
Jet™ Common Platform Video
Watch the Jet Common Platform (JCP) in action. SEMI Compliant EFEM with WaferEngine Automation. JCP is the first EFEM designed at the system level enabling customers to build process tools around a
common core.Learn More
New! FluidX IntelliXcap™ Decapper
The IntelliXcap™, a next generation universal capper/decapper with 'intelligent' technology that includes an advanced storage media detection sensor and a proprietary self-release cartridge mechanism. IntelliXcap simplifies workflow, reduces non-productive downtime, and has a significantly lower cost of operation.
BioStore™ III Cryo -190°C
-190°C vapor phase storage solution providing sample automation, cold chain management, and improved sample security.
CryoPod™ Filling Station Hands-free CryoPod Recharger
PRESS RELEASES & MEDIA
Cryogenics for Semiconductor Video: Learn about advanced cryopumps for the semiconductor industry.
Semiconductor Video Channel: Watch Razor Atmospheric Robots, the 450mm EFEM and other products in action.
Life Science Solutions Video Channel: Watch sample storage and cryogenics systems, devices and instruments in action.
Alignment & Calibration Video Channel: Watch 300mm automation alignment & calibration tools, cassette adapters, checkers and SMIF reticle pod openers in action.