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M330™ Fully-Automatic FOUP/Pod Cleaner

The M330 Cleaner is a world-class fully-automatic FOUP-compatible system that provides superior washing and drying performance, operational ease and More

Jet™ Common Platform Video

Watch the Jet Common Platform (JCP) in action. SEMI Compliant EFEM with WaferEngine Automation. JCP is the first EFEM designed at the system level enabling customers to build process tools around a
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Spartan™ Sorters and EFEM

Learn about semiconductor automation products like the Spartan Sorters and the Spartan Equipment Front End Module (EFEM).

New! FluidX IntelliXcap™ Decapper

FluidX IntelliXcap™ Decapper

The IntelliXcap™, a next generation universal capper/decapper with 'intelligent' technology that includes an advanced storage media detection sensor and a proprietary self-release cartridge mechanism. IntelliXcap simplifies workflow, reduces non-productive downtime, and has a significantly lower cost of operation.

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BioStore™ III Cryo -190°C

-190°C vapor phase storage solution providing sample automation, cold chain management, and improved sample security.
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CryoPod™ Carrier -150°C

SampleStore II Automated Sample Storage

CryoPod™ Filling Station    Hands-free CryoPod Recharger

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Video Channel

New! Cryogenics for Semiconductor Video: Learn about advanced cryopumps for the semiconductor industry.

Video Channel

Semiconductor Video Channel: Watch Razor Atmospheric Robots, the 450mm EFEM and other products in action.

Video Channel

Life Science Solutions Video Channel: Watch sample storage and cryogenics systems, devices and instruments in action.

Video Channel

Alignment & Calibration Video Channel: Watch 300mm automation alignment & calibration tools, cassette adapters, checkers and SMIF reticle pod openers in action.