Contamination Control Products
New automated FOUP and Pod cleaning tools, and new reticle stocker products. Clean material handling minimizes the detrimental effects of airborne molecular contamination (AMC).
Featured Semiconductor Automation Product
Learn about new semiconductor automation products like the Spartan™ Sorters and the Spartan™ Equipment Front End Module (EFEM). Brooks recently acquired Crossing Automation - a leading designer and manufacturer of fab and tool automation products used by today's foremost semiconductor device and equipment companies.
Robust Automated -80° Sample Storage
Scalable with the flexibility to handle a diverse set of container types. Biostore II and Strata™ store control software allow users to monitor and control their collection from any mobile device.
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Flexible & Modular -20°
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Automated Sample Storage
Life Science Systems Solutions
Automated Storage Systems
Instruments & Devices
Labware & Consumables
Video Channel: Watch Razor Atmospheric Robots, the 450mm EFEM and other products in action.
The Spartan Sorter wafer handling platform delivers industry-leading particle performance, low cost of ownership, high reliability, serviceability and maintainability.