New!    Jet™ Common Platform Video

Watch the Jet Common Platform (JCP) in action. SEMI Compliant EFEM with WaferEngine Automation. JCP is the first EFEM designed at the system level enabling customers to build process tools around a common core.green-arrow-liLearn More

Contamination Control Products

New automated FOUP and Pod cleaning tools, and new reticle stocker products. Clean material handling minimizes the detrimental effects of airborne molecular contamination (AMC).

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Featured Semiconductor Automation Product

Learn about new semiconductor automation products like the Spartan™ Sorters and the Spartan™ Equipment Front End Module (EFEM). Brooks recently acquired Crossing Automation - a leading designer and manufacturer of fab and tool automation products used by today's foremost semiconductor device and equipment companies.

BioStore™ II
Robust Automated -80° Sample Storage

Scalable with the flexibility to handle a diverse set of container types. Biostore II and Strata™ store control software allow users to monitor and control their collection from any mobile device.

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SampleStore II Automated Sample Storage

SampleStore™ II

Flexible & Modular -20°
Automated Sample Storage

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Highly configurable models for a range of applications: capacity, throughput and container types. SampleStore II and Strata™ store control software are easy and convenient to use.

Life Science Systems Solutions
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Video Channel

Semiconductor Video Channel: Watch Razor Atmospheric Robots, the 450mm EFEM and other products in action.

Video Channel

Semiconductor Contamination Control Video Channel: Watch FOUP & Pod Cleaners and Reticle Stockers & Changers in action.

Video Channel

Spartan Sorter wafer handling platform delivers industry-leading particle performance, low cost of ownership, high reliability, serviceability and maintainability.